Remote computer access lockout systems and methods for substrate processing systems

A substrate processing system, comprising:

• a first switch including a first input port, a first power input, and a first output port;
• a second switch including a first input/output port and a second power input, wherein the first output port is directly or indirectly connected with the first input/output port of the second switch;
• a lockable key switch movable between an off position and an on position, the lockable key switch being provided in a power supply line connected to supply power to at least one of the first power input or the second power input;
• and
• a key configured to be received by the lockable key switch and configured to move the lockable key switch between the on position and the off position when received by the lockable key switch, wherein:
• (i) in the on position, an electrical circuit including the power supply line for supplying power to at least one of the first power input or the second power input is completed and (ii) in the off position, the electrical circuit including the power supply line for supplying power to at least one of the first power input or the second power input is interrupted.

A method of connecting a substrate processing system with a remote computing system, comprising:

• connecting a remote computing system with a first input port of a first switch, the first switch further including a first power input and a first output port;
• directly or indirectly connecting the first output port of the first switch with a first input/output port of a second switch, the second switch further including a second power input;
• electrically connecting the first power input and the second power input with an electrical connector that includes a lockable key switch, the lockable key switch being movable using a key between an off position and an on position;
• and
• connecting a power source with the electrical connector, wherein the lockable key switch is provided in the electrical connector such that:
• (i) when the lockable key switch is in the on position, the power source supplies power to the first switch and the second switch, and (ii) when the lockable key switch is in the off position, no power is supplied to at least one of the first switch or the second switch by the power source.

A method of connecting a substrate processing system with a remote computing system, comprising:

• connecting a remote computing system with a first input port of a first switch, the first switch further including a first power input and a first output port;
• directly or indirectly connecting the first output port of the first switch with a first input/output port of a second switch, the second switch further including a second power input;
• electrically connecting at least one of the first power input or the second power input with an electrical connector that includes a lockable key switch, the lockable key switch being movable using a key between an off position and an on position;
• and
• connecting a power source with the electrical connector, wherein the lockable key switch is provided in the electrical connector such that:
• (i) when the lockable key switch is in the on position, the power source supplies power to at least one of the first switch or the second switch, and (ii) when the lockable key switch is in the off position, no power is supplied to at least one of the first switch or the second switch by the power source.