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US 2025/0076754 A1Published application
Manufacturing a flowcell with a planar waveguide
AssigneeIllumina, Inc.
InventorsDajun Yuan, M. Shane Bowen, Zhong Mei
Life of this patent
Estimating the term…
Abstract
Provided in one example is a method of manufacturing a flowcell that includes: forming a core layer, the core layer disposed between a substrate and a nanowell layer, the nanowell layer having nanowells to receive a sample, the core layer having a higher refractive index than the substrate and the nanowell layer; and forming a grating to couple light to the core layer.
Claims20
A method of manufacturing a flowcell, the method comprising:
- forming a core layer, the core layer disposed between a substrate and a nanowell layer, the nanowell layer having nanowells to receive a sample, the core layer having a higher refractive index than the substrate and the nanowell layer;
- and
- forming a grating using nanoimprinting to couple light to the core layer.
A method, comprising:
- forming a core layer on a substrate, the core layer comprising a higher refractive index than the substrate;
- forming a nanowell layer on the core layer comprising one or more nanowells defined between two or more walls of the nanowell layer;
- forming a grating on the substrate, the core layer, the nanowell layer, or a combination thereof, the grating comprising a first grating group and a second grating group spaced from the first grating group by an area substantially free of the grating.
Dependencies are inferred from the claim text.