Sensing element and related methods
AssigneeGeneral Electric Company
InventorsRobert James MacDonald, Yizhen Lin, Nicholas G. Yost, David Richard Esler
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AssigneeGeneral Electric Company
InventorsRobert James MacDonald, Yizhen Lin, Nicholas G. Yost, David Richard Esler
Estimating the term…
An apparatus includes a first acoustic sensing resonator formed from a silicon substrate and has a first microelectromechanical system. The apparatus also includes a second acoustic sensing resonator formed from the silicon substrate and has a second microelectromechanical system. The second acoustic sensing resonator is arranged on the silicon substrate at a ninety degree (90°) angle with respect to the first acoustic sensing resonator and together the first acoustic sensing resonator and second acoustic sensing resonator form a torque sensor. A high temperature bonding surface is connected to the torque sensor for directly connecting the torque sensor to a metal object.
An apparatus, the apparatus comprising:
Dependencies are inferred from the claim text.