Substrate transfer apparatus and substrate transfer method

A substrate transfer apparatus comprising:

• a transfer arm;
• a driver configured to move the transfer arm;
• and
• a controller configured to control the driver,
• wherein the transfer arm includes:
• a base portion,
• at least one arm portion connected to the base portion to extend from the base portion and configured to surround an outer circumference of a substrate,
• a plurality of adsorbers provided in the at least one arm portion and each including a suction port that adsorbs a peripheral edge of a back surface of the substrate, and
• a plurality of suction passages provided in the at least one arm portion,
• wherein the plurality of suction passages are connected to the suction ports of the plurality of different adsorbers, respectively.

A substrate transfer method comprising:

• providing a substrate transfer apparatus including,
• a transfer arm configured to transfer a substrate to each of a plurality of processing modules that processes the substrate,
• wherein the transfer arm includes,
• a base portion,
• at least one arm portion connected to the base portion to extend from the base portion and configured to surround an outer circumference of the substrate,
• a plurality of adsorbers provided in the at least one arm portion and each including a suction port that adsorbs a peripheral edge of a back surface of the substrate, and
• a plurality of suction passages provided in the at least one arm portion,
• wherein the plurality of adsorbers include,
• a first adsorber group including a first adsorber and a second adsorber;
• and
• a second adsorber group including a third adsorber and a fourth adsorber,
• wherein the plurality of suction passages include,
• a first suction passage connected to the suction ports of the first adsorber and the second adsorber, and
• a second suction passage connected to the suction ports of the third adsorber and the fourth adsorber;
• detecting pressure in the first suction passage by a first sensor;
• detecting pressure in the second suction passage by a second sensor;
• and
• changing a movement speed of the transfer arm based on results detected by the first sensor and the second sensor.