Semiconductor package and method of manufacturing the semiconductor package
AssigneeSamsung Electronics Co., Ltd.
InventorsJakyoung Gu, Kyoungok Jung, Jihye Shim
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AssigneeSamsung Electronics Co., Ltd.
InventorsJakyoung Gu, Kyoungok Jung, Jihye Shim
Estimating the term…
In a method of manufacturing a semiconductor package, a lower redistribution wiring layer having a central region and a peripheral region surrounding the central region is formed. A photosensitive insulating layer is formed on the lower redistribution wiring layer. A first light is radiated onto the photosensitive insulating layer through a first mask to form a first hardened portion on the central region. A second light is radiated onto the photosensitive insulating layer through a second mask to form a second hardened portion on the peripheral region, the second hardened portion surrounding through opening regions. Non-hardened portions in the through opening regions and at least a portion of the first hardened portion are removed. Conductive structures are formed in the through opening regions. The second hardened portion and the remainder of the first hardened portion are removed using a strip solution.
A method of manufacturing a semiconductor package, the method comprising:
A method of manufacturing a semiconductor package, the method comprising:
A method of manufacturing a semiconductor package, the method comprising:
(canceled)
Dependencies are inferred from the claim text.