Method for performing nanotransfer without chemical treatment and substrate fabricated by the method

Abstract

In a method for performing nanotransfer without chemical treatment and a substrate fabricated by the method, the method includes, (a) forming a polymer mold having a mold protrusion, the mold protrusion being formed on a lower surface of the polymer mold and having a predetermined pattern, (b) depositing a metal on the lower surface of the polymer mold, to form a metal layer on the mold protrusion, (c) positioning the polymer mold on an upper surface of a substrate body at a predetermined temperature and pressurizing the substrate body by a predetermined time with a predetermined pressure, so that the metal layer is transferred on the upper surface of the substrate body according to a predetermined pattern, and (d) detaching the polymer mold from the substrate body, so that the polymer mold is separated from the metal layer transferred on the upper surface of the substrate body.

Dependencies are inferred from the claim text.