Differential phase contrast microanalysis using energy loss spectrometers

An electron microscopy system, comprising:

• an electron source configured to emit a beam of electrons;
• a microscope column, optically coupled with the electron source and configured to receive the beam of electrons from the electron source;
• an energy filter, coupled with the microscope column and configured to receive electrons of the beam of electrons from the microscope column;
• and
• control circuitry, operably coupled with the microscope column and the energy filter, the control circuitry being electronically coupled with one or more non-transitory machine-readable storage media storing instructions that, when executed by the control circuitry, cause the electron microscopy system to perform operations comprising:
• directing the beam of electrons through a material sample disposed in the microscope column, wherein interactions of the material sample and the beam of electrons produce a scattered portion of the beam of electrons;
• directing the scattered portion onto the energy filter, the energy filter being configured to disperse the scattered portion along a dispersal axis by energy and to direct a subset of the scattered portion toward a detector of the energy filter;
• generating detector data using the subset of the scattered portion incident on the detector, the detector data comprising EELS data;
• and
• generating differential phase contrast (DPC) data using the detector data.