Techniques for waveform detection of periodic signals using voltage contrast

A system, comprising:

• a charged particle microscope;
• a computing device, operably coupled with the charged particle microscope;
• and
• one or more non-transitory, machine-readable storage media, operably coupled with the computing device, storing executable instructions that, when executed, cause the system to perform operations comprising:
• directing a pulsed beam of charged particles toward a sample, the sample comprising a conductive feature to which a transient electrical signal is applied, wherein the pulsed beam of charged particles is characterized by a pulse period measured in units of time;
• generating detector data over a period of time corresponding to a multiple of the pulse period, the detector data being generated based at least in part on interactions between the charged particles and the sample;
• and
• generating waveform data describing the transient electrical signal using the detector data.