Catalyst-free crosslinking of propiolate-ester-functionalized molecules and polymers
AssigneeBrewer Science Inc.
InventorsDaniel Patrick Sweat, Joyce A. Lowes
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Abstract
A novel method to prepare crosslinked thin films without the use of catalysts is disclosed. Propiolic acid is grafted to a glycidyl or epoxy group using a phosphonium catalyst under mild conditions to yield a propiolate ester. The propiolate ester is thermally crosslinkable (and the polymer film rendered insoluble) at temperatures as low as 120° C., and some embodiments may undergo photoinduced crosslinking upon exposure to DUV light. The resulting crosslinked films are equivalent or better in stability to acid-catalyzed epoxide crosslinked films and can be used for a multitude of different applications.
Claims37
A method of forming a structure, said method comprising:
- forming an underlayer on a stack, said underlayer being formed from a composition comprising a compound comprising an acetylenic carboxylic acid reacted with an epoxy group;
- optionally forming one or more intermediate layers on said underlayer, there being an uppermost intermediate layer on said substrate surface, if one or more intermediate layers are present;
- and
- applying a photoresist layer to said one or more intermediate layers, if present, or to said underlayer, if no intermediate layers are present.
A structure comprising:
- a substrate having a surface;
- optionally one or more intermediate layers on said substrate surface, there being an uppermost intermediate layer on said substrate surface, if one or more intermediate layers are present;
- an underlayer on said substrate surface, or on said uppermost intermediate layer, if present, said underlayer comprising a compound comprising an acetylenic carboxylic acid reacted with an epoxy group;
- and
- a photoresist on said underlayer.
A method comprising reacting an acetylenic carboxylic acid with an epoxy group at a temperature of about 100° C. or lower to form a reaction product.
A compound having a formula chosen from
A crosslinked layer comprising an acetylenic carboxylic acid reacted with an epoxy group.
Dependencies are inferred from the claim text.