Particle beam analyzer and particle beam analysis method

A particle beam analysis method in which, when an input profile is provided which is obtained by a particle beam being injected into a sample and a reflected beam or a transmitted beam thereof being detected, a spatial density distribution constituting a density distribution relative to a spatial position of the sample is calculated using an analyzer, the particle beam method comprising:

• a profile difference evaluation step in which a profile database holds a plurality of pieces of data of a spatial density distribution and a profile corresponding to the spatial density distribution, and in which a difference between a profile held in the profile database and the input profile is calculated;
• a profile selection step of selecting a plurality of profiles from the data held in the profile database, on a basis of the difference calculated in the profile difference evaluation step;
• an uncertainty level evaluation step of calculating an optimization target position constituting a spatial position specified on a basis of a variation in spatial density distribution for each spatial position with respect to a plurality of spatial density distributions corresponding to the profile selected in the profile selection step;
• a differential regression analysis step of calculating, using regression analysis, a function for obtaining, from the spatial density distribution, a difference from the input profile by using the data held in the profile database and the difference calculated by the profile difference evaluation step;
• and
• a spatial density distribution optimization step of calculating a spatial density distribution for which the difference of the function calculated in the differential regression analysis step is minimized, by using, as a variable, only the spatial density in the optimization target position calculated in the uncertainty level evaluation step.