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AssigneeMax-Planck-Gesellschaft zur Forderung der Wissenschaften e.V.
InventorWolfgang BRAUN
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The invention is related to a method of using a thermal laser evaporation (TLE) system (100), the system (100) comprising a reaction chamber (10) fillable with a reaction atmosphere (14), one or more sources (30) arranged in the reaction chamber (10), each source (30) comprising a source material (32), and a laser source (50) for providing laser radiation (52) at a surface (34) of the source (30) and thereby evaporating the source material (32). Further, the invention is related to a thermal laser evaporation system (100) comprising a reaction chamber (10) fillable with a reaction atmosphere (14), one or more sources (30) arranged in the reaction chamber (10), each source comprising a source material (32), and coupling means (12) provided by the reaction chamber (10) for coupling laser radiation (52) into the reaction chamber (10) for impinging on a surface (34) of the source (30) and thereby evaporating the source material (32).
1-26. (canceled)
Method of using a thermal laser evaporation system, the system comprising a reaction chamber fillable with a reaction atmosphere, one or more sources arranged in the reaction chamber, each source comprising a source material, and a laser source for providing laser radiation at a surface of the source and thereby evaporating the source material,
Thermal laser evaporation system comprising a reaction chamber fillable with a reaction atmosphere, one or more sources arranged in the reaction chamber, each source comprising a source material, and coupling means provided by the reaction chamber for coupling laser radiation into the reaction chamber for impinging on a surface of the source and thereby evaporating the source material, wherein the laser source provides the laser radiation with a spatially modulated intensity pattern, wherein the spatially modulated intensity pattern comprises two or more spaced apart heating spots with an at least locally maximal intensity.
Dependencies are inferred from the claim text.