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AssigneeMax-Planck-Gesellschaft zur Forderung der Wissenschaften e.V.
InventorsJohannes BOSCHKER, Wolfgang BRAUN
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The present invention relates to a temperature control system (10) for adjusting a temperature (60) of a vacuum chamber (102), the temperature control system (10) comprising conduits (20) which can be thermally coupled to a chamber wall (110) of the vacuum chamber (102), a fluid pump (50), temperature adjusting means (30) comprising a heating means (32) or both a heating means (32) and a cooling means (34), and tubing (52) for fluidly connecting said conduits (20), fluid pump (50), and temperature adjusting means (30), respectively. Further, the present invention relates to a vacuum system (100) with a vacuum chamber (102), the vacuum chamber (102) comprising a chamber wall (110) enclosing a vacuum volume (106), a vacuum pump system (104) connected to the vacuum chamber (102) for evacuating the vacuum volume (106), and a temperature control system (10) for adjusting a temperature (60) of a vacuum chamber (102). In addition, the present invention relates to a method of adjusting the temperature (60) of a vacuum chamber (102) of said vacuum system (100).
1-30. (canceled)
Temperature control system for adjusting a temperature of a vacuum chamber, the temperature control system comprising conduits which can be thermally coupled to a chamber wall of the vacuum chamber, a fluid pump, temperature adjusting means comprising a heating means or both a heating means and a cooling means, and tubing for fluidly connecting said conduits, fluid pump, and temperature adjusting means, respectively, wherein the fluid pump is capable of pumping a heating fluid heated by the heating means through the conduits for heating the vacuum chamber, or of pumping both a heating fluid heated by the heating means and a cooling fluid cooled by the cooling means through the conduits for both heating and cooling the vacuum chamber, respectively.
Dependencies are inferred from the claim text.