Sulfuric acid recovery device and method for recovering sulfuric acid
AssigneeKioxia Corporation
InventorMotonari TAKAHASHI
Life of this patent
Estimating the term…
Loading patent…
AssigneeKioxia Corporation
InventorMotonari TAKAHASHI
Estimating the term…
A sulfuric acid recovery device includes a first recovery tank configured to recover sulfuric acid; a concentration meter configured to measure a concentration of hydrogen peroxide in the sulfuric acid; a discharge pipe configured to discharge the sulfuric acid from the first recovery tank to a second recovery tank; a circulation pipe with a maximum installation height position equal to or lower than a maximum installation height position of the discharge pipe and with a flow path formed, causing the sulfuric acid to return to the first recovery tank; a first valve configured to open and close a flow path of the discharge pipe; a pump configured to feed the sulfuric acid discharged to at least the circulation pipe of the circulation pipe and the discharge pipe; and a control circuit configured to control opening and closing of the first valve in accordance with the concentration of the hydrogen peroxide.
A sulfuric acid recovery device comprising:
A method for recovering sulfuric acid, comprising:
Dependencies are inferred from the claim text.