Coupling device for coupling vibration systems

A coupling device for coupling two vibration systems, which are mounted above a substrate such that the vibration systems are linearly arranged along a first direction and can vibrate along the first direction, including:

• a closed spring structure, which can be connected to the vibration systems on outer faces opposite each other along the first direction;
• an anchor structure, which is rigidly connected to the substrate and which is arranged within the closed spring structure and is connected to the spring structure on two inner faces opposite each other along a second direction that is orthogonal to the first direction;
• wherein
• the coupling device connected to the vibration systems imparts push-pull coupling of the vibration systems as the mode with the lowest frequency;
• and
• the anchor structure is configured as a single anchor lying in the center of the spring structure, or
• the anchor structure includes two anchors which are arranged on the first axis of symmetry.