Pressing device, treatment device, and treatment system
AssigneeMitsubishi Heavy Industries, Ltd.
InventorTomohiro MURAI
Life of this patent
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AssigneeMitsubishi Heavy Industries, Ltd.
InventorTomohiro MURAI
Estimating the term…
A pressing device includes: a plurality of pressing portions each configured to generate a pressing force toward a treatment target surface facing in a first direction and arranged in a direction intersecting the first direction; and an interlocking mechanism configured to interlock the plurality of pressing portions and control a pressing amount of each of the pressing portions in the first direction. For example, each of the pressing portions is a fluid device configured to be deformed by a pressure of an internal fluid to generate the pressing force in the first direction, and the interlocking mechanism includes a fluid supply portion configured to supply a fluid to a plurality of the fluid devices and a plurality of speed control valves provided for the respective plurality of the fluid devices and configured to adjust a supply rate of the fluid to each of the fluid devices.
A pressing device, comprising:
Dependencies are inferred from the claim text.