Dry cleaning device and dry cleaning method

A dry cleaning device, adapted to clean a container component of a container of a semiconductor manufacturing process, the dry cleaning device comprising:

• a dry cleaning module, adapted to clean the container component by carbon dioxide snowflakes;
• an inspection module, adapted to inspect the container component to obtain an inspection result;
• a storage module, adapted to store the container component and a corresponding cleaning working set;
• a programmable logic controller (PLC), signally connected to the dry cleaning module, the inspection module and the storage module, the PLC adapted to perform steps of:
• cleaning the container component with carbon dioxide snowflakes by the dry cleaning module according to the cleaning working set;
• inspecting the container component before the cleaning and after the cleaning by the inspection module to obtain the inspection result;
• determining a component type of the container component according to the inspection result before the cleaning, selecting a predetermined cleaning procedure corresponding to the component type from the cleaning working set according to the component type, and cleaning the container component by carbon dioxide snowflakes by the dry cleaning module according to the predetermined cleaning procedure;
• determining, according to the inspection result after the cleaning, whether the cleaning of the container component is complete, and generating a determination result;
• and
• selecting a subsequent cleaning procedure corresponding to the inspection result from the cleaning working set according to the determination result, and cleaning the container component by carbon dioxide snowflakes by the dry cleaning module according to the subsequent cleaning procedure, or forwarding the container component to a next workstation.