Strained transistor with conductive plate
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsChan-Yu HUNG, Chia-Cheng Ho, Fei-Yun Chen, Yu-Chang Jong, Puo-Yu Chiang, Tun-Yi Ho
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AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsChan-Yu HUNG, Chia-Cheng Ho, Fei-Yun Chen, Yu-Chang Jong, Puo-Yu Chiang, Tun-Yi Ho
Estimating the term…
The present disclosure describes a structure with a conductive plate and a method for forming the structure. The structure includes a gate structure disposed on a diffusion region of a substrate, a protective layer in contact with the diffusion region and covering a sidewall of the gate structure and a portion of a top surface of the gate structure, and a first insulating layer in contact with the gate structure and the protective layer. The structure further includes a conductive plate in contact with the first insulating layer, where a first portion of the conductive plate laterally extends over a horizontal portion of the protective layer, and where a second portion of the conductive plate extends over a sidewall portion of the protective layer covering the sidewall of the gate structure. The structure further includes a second insulating layer in contact with the conductive plate.
A structure, comprising:
A structure, comprising:
A structure, comprising:
Dependencies are inferred from the claim text.