Multizone ceramic heater

A multizone ceramic heater comprising:

• a disk-shaped ceramic plate having a first surface on which a wafer is to be placed and a second surface opposite to the first surface, the ceramic plate including an inner zone defined as a circular region within a predetermined distance from a center of the ceramic plate and an outer zone defined as an annular region outside the inner zone when the ceramic plate is viewed in plan view;
• an inner zone heater circuit embedded parallel to the first surface in the inner zone of the ceramic plate;
• an outer zone heater circuit embedded parallel to the first surface at a depth position different from the inner zone heater circuit in the outer zone of the ceramic plate;
• one pair of first feeding terminals for feeding power to the inner zone heater circuit which are provided at a central portion of the inner zone of the ceramic plate;
• one pair of second feeding terminals for feeding power to the outer zone heater circuit which are provided at the central portion of the inner zone of the ceramic plate;
• and
• one pair of jumpers separated from each other which are embedded parallel to the first surface at a same depth position as the outer zone heater circuit in the inner zone of the ceramic plate, one of the one pair of jumpers electrically connecting one of the second feeding terminals and the outer zone heater circuit by a first junction, the other of the one pair of jumpers electrically connecting the other of the second feeding terminals and the outer zone heater circuit by a second junction at a position different from the first junction,
• wherein each of the inner zone heater circuit, the outer zone heater circuit, and the jumpers is a low-profile element composed of a resistance heating element selected from the group consisting of a printed pattern, foil, perforated metal, and a mesh, and
• wherein thicknesses of the jumpers are from 1.2 to 3.0 times a thickness of the outer zone heater circuit.