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US 2025/0062745 A1Published application
Bulk acoustic wave resonators with common cavity
AssigneeSkyworks Global Pte. Ltd.
InventorsAlexandre Augusto Shirakawa, Kwang Jae Shin, Yiliu Wang
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Abstract
An acoustic resonator module has and first and second bulk acoustic wave devices with a common shared air cavity structure between a piezoelectric layer and a substrate.
Claims20
An acoustic resonator module, comprising:
- a substrate;
- a first bulk acoustic wave device mounted on the substrate, the first bulk acoustic wave device including a first electrode and a second electrode deposited on opposite surfaces of a piezoelectric layer;
- a second bulk acoustic wave device mounted on the substrate, the second bulk acoustic wave device including a third electrode and a fourth electrode deposited on opposite surfaces of the piezoelectric layer;
- and
- a common air cavity structure between the piezoelectric layer and the substrate, the common air cavity structure shared by the first bulk acoustic wave device and the second bulk acoustic wave device.
2 more elements
An acoustic wave filter, comprising an acoustic resonator module, the acoustic resonator module including:
- a substrate;
- a first bulk acoustic wave resonator mounted on the substrate, the first bulk acoustic wave resonator including a first electrode and a second electrode deposited on opposite surfaces of a piezoelectric layer;
- a second bulk acoustic wave resonator mounted on the substrate, the second bulk acoustic wave resonator including a third electrode and a fourth electrode deposited on opposite surfaces of the piezoelectric layer;
- and
- a common air cavity structure between the piezoelectric layer and the substrate, the common air cavity structure shared by the first bulk acoustic wave resonator and the second bulk acoustic wave resonator.
2 more elements
A radio frequency module:
- a radio frequency circuit element;
- and
- an acoustic wave die including at least one acoustic wave filter having an acoustic resonator module, the acoustic resonator module including a substrate;
- a first bulk acoustic wave resonator mounted on the substrate, the first bulk acoustic wave resonator including a first electrode and a second electrode deposited on opposite surfaces of a piezoelectric layer;
- a second bulk acoustic wave resonator mounted on the substrate, the second bulk acoustic wave resonator including a third electrode and a fourth electrode deposited on opposite surfaces of the piezoelectric layer;
- and a common air cavity structure between the piezoelectric layer and the substrate, the common air cavity structure shared by the first bulk acoustic wave resonator and the second bulk acoustic wave resonator.
3 more elements
Dependencies are inferred from the claim text.