Laser system and electronic device manufacturing method

An electronic device manufacturing method, comprising:

• generating laser light having a second wavelength using a laser system;
• generating ultraviolet laser light by performing wavelength conversion on the laser light having the second wavelength;
• outputting the ultraviolet laser light to an exposure apparatus;
• and
• exposing a photosensitive substrate to the ultraviolet laser light in the exposure apparatus to manufacture an electronic device,
• the laser system including:
• a pump laser device configured to output pump laser light having a first wavelength;
• a signal laser device configured to output signal laser light having the second wavelength longer than the first wavelength;
• and
• an amplification system including a plurality of optical parametric crystals configured to transmit the pump laser light and the signal laser light and output amplification light having the second wavelength,
• the plurality of optical parametric crystals including a first optical parametric crystal and a second optical parametric crystal arranged in series with the first optical parametric crystal, and
• the amplification system:
• being arranged such that beam waist positions of first amplification light, output from the first optical parametric crystal, incident on the second optical parametric crystal, and having the second wavelength and the pump laser light incident on the second optical parametric crystal coincide with each other, and that the first amplification light and the pump laser light are coaxially incident on the second optical parametric crystal, and
• including a first beam diameter adjustment optical system in which a ratio of a beam waist diameter of the pump laser light in the second optical parametric crystal with respect to a beam waist diameter of the first amplification light in the second optical parametric crystal is set larger than a ratio of a beam waist diameter of the pump laser light in the first optical parametric crystal with respect to a beam waist diameter of the signal laser light in the first optical parametric crystal.