Series of stacked confocal pulse stretchers for speckle reduction
AssigneeCymer, Inc.
InventorsEric Anders Mason, Zhong Quan Zhao, Hong Ye
Life of this patent
Estimating the term…
Loading patent…
AssigneeCymer, Inc.
InventorsEric Anders Mason, Zhong Quan Zhao, Hong Ye
Estimating the term…
An extended optical pulse stretcher is provided that combines confocal pulse stretchers in combination to produce, for example, 4 reflections, 4 reflections, 12 reflections, and 12 reflections per optical circuit configuration. The inclusion of the combination of different mirror separations and delay path lengths can result in very long pulse stretching, long optical delays, and minimal efficiency losses. Also, in the extended optical pulse stretcher, at least a beam splitter can be positioned relative to the center of curvature of the mirrors to “flatten” each of the circuits to enable the beam to propagate in the same plane (e.g., parallel to the floor). Also, the curvatures and sizes of the individual mirrors can be designed to position the beam splitter closer to one of the banks of mirrors to allow the optical pulse stretchers to properly fit in an allocated location in a laser system.
A pulse stretcher system configured to stretch pulses of light output by a laser chamber, the pulse stretcher system comprising:
A pulse stretcher system configured to stretch pulses of light generated by a laser source, the pulse stretcher system comprising:
47-80. (canceled)
A laser source comprising:
A pulse stretcher system configured to stretch pulses of light generated by a laser source, the pulse stretcher system comprising:
Dependencies are inferred from the claim text.