Vertically Stacked Capacitors

A capacitor assembly comprising a vertical stacking of a first capacitor and a second capacitor on a substrate,

• wherein the first capacitor comprises a first terminal and a second terminal, wherein the second terminal is formed by a first conductive layer that comprises stress relief openings,
• wherein the second capacitor comprises a first terminal and a second terminal,
• wherein, relative to a surface of the substrate, the second terminal of the first capacitor lies below the first terminal of the first capacitor, and wherein the second terminal of the second capacitor lies below the first terminal of the second capacitor, and wherein the second capacitor lies below the first capacitor,
• wherein the capacitor assembly further comprises a ground layer arranged in between the first conductive layer and the first terminal of the second capacitor, wherein the second terminal of the second capacitor is electrically connected, through one or more vias, to the ground layer and to the first conductive layer, wherein the ground layer comprises stress relief openings that are laterally separated from the stress relief openings of the first conductive layer, and
• wherein the ground layer is configured to be electrically grounded during operation.