Metal insulator metal capacitor (mim capacitor)

Abstract

A semiconductor device including a metal insulator metal capacitor (MIM capacitor) within back end of line circuitry of the semiconductor device, and an outer plate contact opening of an outer plate of the MIM capacitor, wherein a portion of an inner plate is removed, where portions of the outer plate are removed from corners of the outer plate opening. A metal insulator metal capacitor (MIM capacitor) within back end of line circuitry of the semiconductor device, and a non-rectangular contact opening of an outer plate of the MIM capacitor. Forming a metal insulator metal capacitor (MIM capacitor) within back end of line circuitry of the semiconductor device, and an outer plate contact opening of an outer plate of the MIM capacitor, where a portion of an inner plate is removed, where portions of the outer plate are removed from corners of the outer plate opening.

Dependencies are inferred from the claim text.