System and method for ring frame cleaning and inspection
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsChien-Fa LEE, Hsu-Shui LIU, Jiun-Rong PAI, Shou-Wen KUO, Jian-Hung CHEN, M.C. LIN, C.C. CHIEN, Hsuan LEE, Boris HUANG
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Abstract
A system and method for cleaning ring frames is disclosed. In one embodiment, a ring frame processing system includes: a plurality of blades for mechanically removing tapes and tape residues from surfaces of a ring frame; a plurality of wheel brushes for conditioning the surfaces of the ring frame; and a transport mechanism for transporting the ring frame.
Claims20
A ring frame cleaning system comprising:
- a plurality of blades for mechanically removing tapes and tape residues from surfaces of a ring frame;
- a plurality of wheel brushes for conditioning the surfaces of the ring frame;
- and
- a transport mechanism for transporting the ring frame.
The system of claim 5, wherein the at least one non-woven wheel brush comprises at least one of the following:
- aluminum oxide, silicon carbide, and ceramic.
A ring frame cleaning system comprising:
- a plurality of blades for mechanically removing tapes and tape residues from surfaces of a ring frame, wherein a first blade of the plurality of blades is configured to remove a first tape on a first surface of the ring frame, and wherein a second blade of the plurality of blades is configured to remove second adhesive residues from a second tape on a second surface of the ring frame;
- a plurality of wheel brushes for conditioning the surfaces of the ring frame;
- and
- a transport mechanism for transporting the ring frame.
A ring frame cleaning system comprising:
- a plurality of blades for mechanically removing tapes and tape residues from surfaces of a ring frame;
- a plurality of wheel brushes for conditioning the surfaces of the ring frame, wherein the plurality of wheel brushes comprises a first wheel brush configured to clean adhesive residues from the first tape on the first surface of the ring frame;
- and
- a transport mechanism for transporting the ring frame.
Dependencies are inferred from the claim text.