Electrostatic chucks with self-sealing gas conduits and/or reduced clogging due to residue
AssigneeLam Research Corporation
InventorsKadthala R. NARENDRNATH, Behnam BEHZIZ, Benny WU, Moreshwar Narayan PURANDARE
Life of this patent
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Abstract
An electrostatic chuck for a substrate includes a baseplate including a first surface and a cavity arranged on the first surface. A top plate includes a first plug. A first spring member is arranged in the cavity. A second plug is arranged between the top plate and the first spring member. A bonding material attaches the top plate to the first surface of the baseplate.
Claims50
An electrostatic chuck for a substrate, comprising:
- a baseplate including a first surface and a cavity arranged on the first surface;
- a top plate including a first plug;
- one or more spring members including a first spring member arranged in the cavity;
- a second plug arranged between the top plate and the first spring member;
- and
- a bonding material attaching the top plate to the first surface of the baseplate.
A method of making an electrostatic chuck for a substrate, comprising:
- providing a baseplate including a first surface and a cavity arranged on the first surface;
- providing a top plate including a first plug;
- arranging a first spring member in the cavity;
- arranging a second plug between the top plate and the first spring member;
- and
- attaching the top plate to the first surface of the baseplate using a bonding material.
An electrostatic chuck for a substrate, comprising:
- a baseplate including a first surface and a cavity arranged on the first surface,
- wherein the cavity includes a first cavity portion defining a first annular surface and a second cavity portion defining a second annular surface;
- a top plate including a first plug;
- a first spring member arranged on the first annular surface in the first cavity portion;
- a second plug arranged on the second annular surface between the top plate and the second annular surface;
- a sleeve arranged around the second plug and on the first spring member;
- and
- a bonding material attaching the top plate to the first surface of the baseplate.
A method for making an electrostatic chuck for a substrate, comprising:
- providing a baseplate including a first surface and a cavity arranged on the first surface,
- wherein the cavity includes a first cavity portion defining a first annular surface and a second cavity portion defining a second annular surface;
- providing a top plate including a first plug;
- arranging a first spring member on the first annular surface in the first cavity portion;
- arranging a second plug on the second annular surface between the top plate and the second annular surface;
- arranging a sleeve around the second plug and on the first spring member;
- and
- bonding the top plate to the first surface of the baseplate.
Dependencies are inferred from the claim text.