Large Format Continuous Imaging System

An inspection apparatus for detecting anomalies, comprising:

• at least one time delay integrated (TDI) linear sensor that has a TDI linear sensor length of approximately 50 mm to approximately 160 mm, a TDI linear sensor optical input, and a TDI linear sensor data output;
• a plurality of optical assemblies positioned adjacent to each other, wherein each of the plurality of optical assemblies is positioned with an optical output focused on a segment of the TDI linear sensor length and an optical input with an input field-of-view (FOV) positioned to receive a portion of a surface under examination;
• a platform with an upper surface for supporting an object with the surface under examination and with a 4-axis motion assembly configured to move the platform;
• and
• a controller in communication with the 4-axis motion assembly, the plurality of optical assemblies, and the TDI linear sensor and is configured to scan an entire surface of a substrate or a carrier.

A method of obtaining inspection data, comprising:

• scanning across a surface of a substrate or carrier with a plurality of optical assemblies positioned adjacent to each other;
• receiving image data from the surface into the plurality of optical assemblies which is focused onto a single time delay integration (TDI) linear sensor, wherein each optical assembly focuses image data on a different portion of the TDI linear sensor;
• reconstructing the image data from the TDI linear sensor to form reconstructed image data and mapping the reconstructed image data to a location on the surface;
• analyzing the reconstructed image data and location data to determine locations of anomalies and form a defectivity map of the surface;
• and
• forming inferences based on the defectivity map and performing a corrective action based on the inferences.