Uniformity control circuit for impedance match
AssigneeLam Research Corporation
InventorsAlexei M. Marakhtanov, Felix Leib Kozakevich, Bing Ji, John P. Holland
Life of this patent
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Abstract
An impedance match housing is described. The impedance match housing includes an impedance matching circuit having an input that is coupled to a radio frequency (RF) generator. The impedance matching circuit has an output that is coupled to a first RF strap. The impedance match housing includes a uniformity control circuit coupled in parallel to a portion of the first RF strap to modify uniformity in a processing rate of a substrate when the substrate is processed within a plasma chamber.
Claims20
A uniformity control circuit (UCC) for achieving uniformity in a processing rate of a substrate, comprising:
- a portion of a radio frequency (RF) transmission line;
- a first RF strap coupled to the portion;
- a capacitor coupled to the first RF strap;
- and
- a second RF strap coupled to the capacitor and the portion of the RF transmission line, wherein the capacitor achieves the uniformity in the processing rate.
A computer for achieving uniformity in a processing rate of a substrate, comprising:
- a memory device;
- and
- a processor coupled to the memory device, wherein the processor is coupled to a capacitor, wherein the capacitor is coupled to a first RF strap and a second RF strap, wherein the first and second RF straps are coupled to a portion of a radio frequency (RF) transmission line, wherein the processor is configured to modify a capacitance of the capacitor to achieve the uniformity in the processing rate.
A plasma system comprising:
- a housing having an impedance matching circuit, wherein the housing has an output and an input, wherein the input is configured to be coupled to a radio frequency (RF) generator;
- an RF transmission line coupled to the output of the housing, wherein the RF transmission line has a portion;
- and
- a uniformity control circuit coupled to the portion of the RF transmission line, wherein the uniformity control circuit includes:
- a first RF strap coupled to the portion of the RF transmission line;
- a capacitor coupled to the first RF strap;
- and
- a second RF strap coupled to the capacitor and the portion of the RF transmission line.
Dependencies are inferred from the claim text.