An optical system implemented in a system for fast optical inspection of targets
AssigneeASML Netherlands B.V.
InventorsSimon Reinald HUISMAN, Sebastianus Adrianus GOORDEN, Stephen ROUX
Life of this patent
Estimating the term…
Abstract
A system includes optical devices, reflective devices, a movable reflective device, and a detector. The optical devices are disposed at a first plane and around a axis of the system and receive scattered radiation from targets. The reflective devices are disposed at at least a second plane and around the axis. Each of the reflective devices receives the scattered radiation from a corresponding one of the optical devices. The movable reflective device is disposed along the axis and receives the scattered radiation from each of the reflective devices. The detector receives the scattered radiation from the movable reflective device.
Claims20
A system comprising:
- optical devices disposed at a first plane and around an axis of the system and configured to receive scattered radiation from targets;
- reflective devices disposed at at least a second plane and around the axis, each of the reflective devices is configured to receive the scattered radiation from a corresponding one of the optical devices;
- a movable reflective device disposed along the axis and configured to receive the scattered radiation from each of the reflective devices;
- and
- a detector configured to receive the scattered radiation from the movable reflective device.
Dependencies are inferred from the claim text.