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US 2025/0060667 A1Published application
Salt, acid generator, resist composition and method for producing resist pattern
AssigneeSumitomo Chemical Company, Limited
InventorsShohei Terahigashi, Issei Kitamura, Koji Ichikawa
Life of this patent
Estimating the term…
Abstract
A salt represented by formula (I), a salt or resin including a structural unit represented by formula (IP), an acid generator including the salt, an acid generator including the resin, or a resist composition including the acid generator.
Claims19
A salt represented by formula (I):
- wherein, in formula (I),
- Q1 and Q2 each independently represent a hydrogen atom, a fluorine atom, an alkyl group having 1 to 6 carbon atoms, or a perfluoroalkyl group having 1 to 6 carbon atoms,
- R11 and R12 each independently represent a hydrogen atom, a fluorine atom, an alkyl group having 1 to 6 carbon atoms, or a perfluoroalkyl group having 1 to 6 carbon atoms,
- z represents an integer of 0 to 6, and when z is 2 or more, a plurality of R11 and R12 may be the same or different from each other,
- X1 represents *—CO—O—, *—O—CO—, *—O—CO—O— or *—O—, and * represents a bonding site to C(R11) (R12) or C(Q1) (Q2),
- mm1 represents 0 or 1,
- L1 represents a single bond or a hydrocarbon group having 1 to 40 carbon atoms which may have a substituent, and —CH2— included in the hydrocarbon group may be replaced by —O—, —S—, —SO2— or —CO—,
- R1 represents a halogen atom or a haloalkyl group having 1 to 12 carbon atoms,
- R2 represents a halogen atom, a hydroxy group, a haloalkyl group having 1 to 12 carbon atoms, or an alkyl group having 1 to 12 carbon atoms, and —CH2— included in the haloalkyl group and the alkyl group may be replaced by —O— or —CO—,
- m2 represents an integer of 0 to 5, and when m2 is 2 or more, a plurality of R2 may be the same or different from each other,
- Rbb1 represents a hydrogen atom, a halogen atom, or an alkyl group having 1 to 6 carbon atoms which may have a halogen atom,
- X10 represents a single bond, *—O—**, *—CO—O—**, *—O—CO—O—**, *—CO—NR3—**, *—NR3—CO—O—**, *—O—CO—NR3—** or *-Ax-Ph-Ay-**,
- R3 represents a hydrogen atom or an alkyl group having 1 to 6 carbon atoms,
- Ph represents a phenylene group which may have a substituent,
- Ax and Ay each independently represent one or more groups selected from the group consisting of a single bond, an ether bond, a thioether bond, an ester bond, an amide bond and a carbonic acid ester bond,
- * and ** represent a bonding site, and * represents a bonding site to carbon atoms to which Rbb1 is bonded,
- L10 represents a single bond or a hydrocarbon group having 1 to 36 carbon atoms which may have a substituent, and —CH2— included in the hydrocarbon group may be replaced by —O—, —S—, —SO2— or —CO—, and
- Z+ represents an organic cation.
15 more elements
A resin comprising a structural unit represented by formula (IP):
- wherein, in formula (IP),
- Q1 and Q2 each independently represent a hydrogen atom, a fluorine atom, an alkyl group having 1 to 6 carbon atoms or a perfluoroalkyl group having 1 to 6 carbon atoms,
- R11 and R12 each independently represent a hydrogen atom, a fluorine atom, an alkyl group having 1 to 6 carbon atoms, or a perfluoroalkyl group having 1 to 6 carbon atoms,
- z represents an integer of 0 to 6, and when z is 2 or more, a plurality of R11 and R12 may be the same or different from each other,
- X1 represents *—CO—O—, *—O—CO—, *—O—CO—O— or *—O—, and * represents a bonding site to C(R11) (R12) or C(Q1) (Q2),
- mm1 represents 0 or 1,
- L1 represents a single bond or a hydrocarbon group having 1 to 40 carbon atoms which may have a substituent, and —CH2— included in the hydrocarbon group may be replaced by —O—, —S—, —SO2— or —CO—,
- R1 represents a halogen atom or a haloalkyl group having 1 to 12 carbon atoms,
- R2 represents a halogen atom, a hydroxy group, a haloalkyl group having 1 to 12 carbon atoms or an alkyl group having 1 to 12 carbon atoms, and —CH2— included in the haloalkyl group and the alkyl group may be replaced by —O— or —CO—,
- m2 represents an integer of 0 to 5, and when m2 is 2 or more, a plurality of R2 may be the same or different from each other,
- Rbb1 represents a hydrogen atom, a halogen atom, or an alkyl group having 1 to 6 carbon atoms which may have a halogen atom,
- X10 represents a single bond, *—O—**, *—CO—O—**, *—O—CO—O—**, *—CO—NR3—**, *—NR3—CO—O—**, *—O—CO—NR3—** or *-Ax-Ph-Ay-**,
- R3 represents a hydrogen atom or an alkyl group having 1 to 6 carbon atoms,
- Ph represents a phenylene group which may have a substituent,
- Ax and Ay each independently represent one or more bonds selected from the group consisting of a single bond, an ether bond, a thioether bond, an ester bond, an amide bond and a carbonic acid ester bond,
- * and ** represent a bonding site, and * represents a bonding site to carbon atoms to which Rbb1 is bonded,
- L10 represents a single bond or a hydrocarbon group having 1 to 36 carbon atoms which may have a substituent, and —CH2— included in the hydrocarbon group may be replaced by —O—, —S—, —SO2— or —CO—, and
- Z+ represents an organic cation.
15 more elements
Dependencies are inferred from the claim text.