Production method of template, template blank, and template substrate for imprinting, production method of template for imprinting, and template

A template to be used for imprint lithography transferring a transfer pattern in a concave and convex structure to a resin on a transfer substrate, the template comprising:

• a first step structure on a main surface of a base,
• a second step structure on the first step structure, and
• at an upper surface of the second step structure, a first concave and convex structure body configuring the transfer pattern, and a second concave and convex structure body configuring an alignment mark;
• wherein
• an outer side region of the second step structure at an upper surface of the first step structure is covered with a light shielding film;
• a high contrast film configured by a film of a different material from a material configuring the base, is on the light shielding film and on a bottom surface of a concave part in the second concave and convex structure body;
• a distance in a vertical direction from the main surface of the base to an upper surface of the light shielding film on the first step structure is H1;
• a distance in a vertical direction from the main surface of the base to an upper surface of the second step structure is H3,
• a distance in a horizontal direction from an outer edge of the main surface of the base to an outer edge of an upper surface of the first step structure is D1;
• a distance in a horizontal direction from the outer edge of the main surface of the base to an outer edge of the upper surface of the second step structure is D2;
• and
• H1≤H3×(D1/D2).