Sensor
AssigneeTDK Corporation
InventorsKeisuke TAKASUGI, Kenzo MAKINO, Hiraku HIRABAYASHI, Masanori SAKAI
Life of this patent
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Abstract
A magnetic sensor includes a first insulating layer, a second insulating layer, a third insulating layer, a lower coil element located on an opposite side of the first insulating layer from the second insulating layer, and a second MR element. The second MR element includes a magnetization pinned layer and a free layer. The magnetization pinned layer and the free layer are located on an opposite side of the third insulating layer from the second insulating layer. The first and third insulating layers each contain a first insulating material. The second insulating layer contains a second insulating material.
Claims22
A sensor configured to detect a physical quantity, the sensor comprising:
- a first insulating layer, a second insulating layer, and a third insulating layer arranged in order along a first direction;
- and
- a sensor element configured to change in a physical property depending on the physical quantity, wherein:
- the sensor element is located on an opposite side of the third insulating layer from the second insulating layer;
- one or two of insulating layers of the first insulating layer, the second insulating layer, and the third insulating layer contain a first insulating material different from a second insulating material contained in another one of the insulating layers;
- the second insulating layer includes a first portion and a second portion located at a position different from the first portion in a second direction orthogonal to the first direction;
- and
- a maximum dimension of the second portion in the first direction is greater than a maximum dimension of the first portion in the first direction.
A sensor configured to detect a physical quantity, the sensor comprising:
- a first insulating layer, a second insulating layer, and a third insulating layer arranged in order along a first direction;
- and
- a sensor element configured to change in a physical property depending on the physical quantity, wherein:
- the sensor element is located on an opposite side of the third insulating layer from the second insulating layer;
- one or two of insulating layers of the first insulating layer, the second insulating layer, and the third insulating layer contain a first insulating material different from a second insulating material contained in another one of the insulating layers;
- and
- a maximum dimension of the second insulating layer in the first direction is greater than a maximum dimension of the first insulating layer in the first direction and that of the third insulating layer in the first direction.
A sensor configured to detect a physical quantity, the sensor comprising:
- a first insulating layer, a second insulating layer, and a third insulating layer arranged in order along a first direction;
- a metal layer located on an opposite side of the first insulating layer from the second insulating layer;
- and
- a sensor element configured to change in a physical property depending on the physical quantity, wherein:
- the sensor element is located on an opposite side of the third insulating layer from the second insulating layer;
- one or two of insulating layers of the first insulating layer, the second insulating layer, and the third insulating layer contain a first insulating material different from a second insulating material contained in another one of the insulating layers;
- and
- the second insulating material has a fracture toughness value higher than that of the metal layer.
Dependencies are inferred from the claim text.