Prediction device, test system, prediction method, and prediction program
AssigneeTokyo Electron Limited
InventorHiroaki HAYASHI
Life of this patent
Estimating the term…
Abstract
Information for realizing an efficient transfer schedule by the transfer section is provided. A prediction device includes a calculation unit configured to calculate a test time length when a test of a wafer has been performed by a tester; a test time prediction unit configured to predict a current test time length based on past test time lengths calculated by the calculation unit; an end time prediction unit configured to predict, when a start time of a test of a test target wafer by the tester is acquired, an end time of the test of the test target wafer based on the predicted test time length; and a storage unit configured to store at least the predicted test time length and the predicted end time in a readable manner.
Claims14
A prediction device comprising:
- a processor;
- and
- a memory storing program instructions that cause the processor to:
- calculate a test time length when a test of a wafer has been performed by a tester;
- predict a current test time length based on past test time lengths calculated by the processor;
- predict, when a start time of a test of a test target wafer by the tester is acquired, an end time of the test of the test target wafer based on the predicted test time length;
- and
- store at least the predicted test time length and the predicted end time in a readable manner.
A prediction method comprising:
- calculating a test time length when a test of a wafer has been performed by a tester;
- predicting a current test time length based on past test time lengths calculated in the calculating of the test time length;
- predicting, when a start time of a test of a test target wafer by the tester is acquired, an end time of the test of the test target wafer based on the predicted test time length;
- and
- storing at least the predicted test time length and the predicted end time in a readable manner.
A non-transitory computer-readable recording medium having stored therein a prediction program for causing a computer to execute:
- calculating a test time length when a test of a wafer has been performed by a tester;
- predicting a current test time length based on past test time lengths calculated in the calculating of the test time length;
- predicting, when a start time of a test of a test target wafer by the tester is acquired, an end time of the test of the test target wafer based on the predicted test time length;
- and
- storing at least the predicted test time length and the predicted end time in a readable manner.
Dependencies are inferred from the claim text.