Radiation source device
AssigneeInfineon Technologies AG
InventorsDerek Debie, Klaus Elian, Ludwig Heitzer, David Tumpold, Jens Pohl, Cyrus Ghahremani, Thorsten Meyer, Christian Geissler, Andreas Allmeier
Life of this patent
Estimating the term…
Abstract
A radiation source device includes at least one membrane layer, a radiation source structure to emit electromagnetic or infrared radiation, a substrate and a spacer structure, wherein the substrate and the at least one membrane form a chamber, wherein a pressure in the chamber is lower than or equal to a pressure outside of the chamber, and wherein the radiation source structure is arranged between the at least one membrane layer and the substrate.
Claims20
A radiation source device, comprising:
- a first membrane layer;
- a radiation source structure configured to emit electromagnetic or infrared radiation;
- a spacer structure;
- and
- a second membrane layer,
- wherein the first membrane layer and the second membrane layer are at least partially permeable for electromagnetic radiation,
- wherein the first membrane layer, the spacer structure, and the second membrane layer form a chamber enclosing the radiation source structure, wherein a pressure in the chamber is lower than or equal to a pressure outside of the chamber, and
- wherein the radiation source structure is arranged between the first membrane layer and the second membrane layer.
A gas sensor, comprising:
- a radiation source device comprising:
- a first membrane layer;
- a radiation source structure configured to emit electromagnetic or infrared radiation;
- a spacer structure;
- and
- a second membrane layer, wherein:
- the first membrane layer and the second membrane layer are at least partially permeable for electromagnetic radiation,
- the first membrane layer, the spacer structure, and the second membrane layer form a chamber enclosing the radiation source structure, wherein a pressure in the chamber is lower than or equal to a pressure outside of the chamber, and
- the radiation source structure is arranged between the first membrane layer and the second membrane layer;
- a measurement volume having a target gas and providing an optical interaction for the electromagnetic or infrared radiation emitted by the radiation source device;
- and
- an acoustic transducer or a direct thermal detector for providing a detector output signal based on the optical interaction with the target gas in the measurement volume.
A gas sensor, comprising:
- a radiation source device comprising:
- a first membrane layer;
- a radiation source structure configured to emit electromagnetic or infrared radiation;
- a spacer structure attached to the radiation source structure;
- and
- a second membrane layer;
- wherein the first membrane layer and the second membrane layer are at least partially permeable for electromagnetic radiation,
- wherein the first membrane layer, the spacer structure, and the second membrane layer form a chamber enclosing the radiation source structure, wherein a pressure in the chamber is lower than or equal to a pressure outside of the chamber, and
- wherein the radiation source structure is arranged between the first membrane layer and the second membrane layer;
- a measurement volume having a target gas and providing an optical interaction for the electromagnetic or infrared radiation emitted by the radiation source device;
- and
- an acoustic transducer or a direct thermal detector for providing a detector output signal based on the optical interaction with the target gas in the measurement volume.
Dependencies are inferred from the claim text.