Back to results
US 2025/0059964 A1Published application
Cryopump, cryopump control system and cryopump control method
AssigneeVacree Technologies Co., Ltd.
InventorsJialiang DENG, Yang YANG, Yifeng WU, Xiang CHENG, Yusong HAN, Xinyu FENG, Jianyong WANG, Huan ZENG, Haifeng ZHANG, Xuehua ZHANG
Life of this patent
Estimating the term…