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US 2025/0059637 A1Published application
Deposition mask
AssigneeSamsung Display Co., Ltd.
InventorsJun Ho JO, Sung Woon KIM, Jeong Kuk KIM, Duck Jung LEE, Il Soo LEE, Jin Woo LEE, Sug Woo JUNG, Sung Won CHO
Life of this patent
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Abstract
A deposition mask includes a mask body including a silicon substrate, where a plurality of holes is defined through the mask body, and the mask body further includes mask grids extending to define the holes. A cross section of each mask grid has a reverse tapered shape having a width increasing from a back surface to an upper surface of the deposition mask, and each side surface of each mask grid defining a hole includes a first concave curved surface.
Claims20
A deposition mask comprising:
- a mask body comprising a silicon substrate, wherein a plurality of holes is defined through the mask body;
- and
- wherein the mask body further comprises mask grids extending to define the holes,
- wherein a cross section of each mask grid has a reverse tapered shape having a width increasing from a back surface to an upper surface of the deposition mask, and each side surface of each mask grid defining a hole comprises a first concave curved surface.
1 more element
A deposition mask comprising:
- a mask body comprising a silicon substrate, wherein a plurality of holes is defined through the mask body;
- and
- wherein the mask body further comprises mask grids extending to define the holes,
- wherein a cross section of each mask grid has a reverse tapered shape which has a width increasing from a back surface to an upper surface of the deposition mask, and each side surface of each mask grid defining a hole comprises a plurality of first concave curved surfaces.
1 more element
Dependencies are inferred from the claim text.