Micro-electromechanical system (mems) structure and mems microphone comprising same
AssigneeMemsensing Microsystems (Suzhou, China) Co., Ltd.
InventorsGenlan RONG, Kai SUN, Yanzi MENG, Wei HU
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Abstract
Disclosed are a micro-electromechanical system (MEMS) structure and an MEMS microphone comprising same. The MEMS structure comprises a back plate; and a diaphragm located on one side of the back plate, wherein the diaphragm and the back plate forms a variable capacitor, the diaphragm comprises multiple first through holes and air release structures respectively corresponding to the first through holes, and the diaphragm further comprises one or more second through holes penetrating through the diaphragm.
Claims19
A micro-electromechanical system structure, wherein the micro-electromechanical system structure comprises:
- a back plate;
- a diaphragm, the diaphragm is located on one side of the back plate, wherein the diaphragm and the back plate form a variable capacitor, the diaphragm comprises a plurality of first through holes and one or more air release structures corresponding to the first through holes;
- wherein the diaphragm further comprises one or more second through holes penetrating through the diaphragm.
A MEMS microphone, wherein the MEMS microphone comprises the micro-electromechanical system structure, comprising:
- a back plate;
- a diaphragm, the diaphragm is located on one side of the back plate, wherein the diaphragm and the back plate form a variable capacitor, the diaphragm comprises a plurality of first through holes and one or more air release structures corresponding to the first through holes;
- wherein the diaphragm further comprises one or more second through holes penetrating through the diaphragm.
Dependencies are inferred from the claim text.