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US 2025/0058284 A1Published application
Vacuum leak detector having a sprayed-against membrane-test leak, and method
AssigneeInficon GmbH
InventorsDaniel WETZIG, Jochen PUCHALLA-KÖNIG, Silvio DECKER, Sebastian WEISS
Life of this patent
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Abstract
A vacuum leak detector has a housing enclosing a suction chamber, a vacuum pump evacuating the suction chamber, and a gas detector connected to the suction chamber. The housing has a test leak with a selectively gas-permeable membrane. The test leak connects the outer atmosphere of the housing with the suction chamber.
Claims16
1-11. (canceled)
A vacuum leak detector comprising:
- a housing enclosing a suction chamber;
- a vacuum pump evacuating the suction chamber;
- and
- a gas detector connected to the suction chamber,
- wherein the housing comprises a test leak with a membrane that is selectively gas-permeable, and wherein the test leak connects an outer atmosphere of the housing with the suction chamber.
2 more elements
Dependencies are inferred from the claim text.