Resonator and resonator drive method
AssigneeDB HiTek Co., Ltd.
InventorJung Ah KIM
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Abstract
A resonator drive method is provided. The resonator drive method comprises: driving a third electrode that is higher than the first electrode and the second electrode based on an upper surface of the substrate, which are spaced apart from each other at a first interval on a substrate, to descend toward the substrate; and arranging the third electrode between the first electrode and the second electrode to be in contact with the upper surface of the substrate and arranging the first electrode, the second electrode, and the third electrode to be spaced apart from one another at a second interval, wherein the second interval is less than the first interval.
Claims20
A resonator comprising:
- a substrate;
- a first electrode and a second electrode disposed on the substrate at a first interval;
- a plurality of arrangement electrodes disposed on the substrate, including the first electrode and the second electrode, and changing included electrodes based on a state;
- an actuator configured to adjust an interval between the plurality of arrangement electrodes;
- and
- a third electrode driven by the actuator and located between the first electrode and the second electrode,
- wherein, in a first state, the third electrode is higher than the first electrode and the second electrode based on an upper surface of the substrate, and the plurality of arrangement electrodes include the first electrode and the second electrode spaced apart from each other at the first interval,
- in a second state, the third electrode is moved toward the substrate by the actuator to be disposed between the first electrode and the second electrode on the substrate, and the first electrode, the second electrode, and the third electrode are spaced apart from one another at a second interval less than the first interval, and
- the plurality of arrangement electrodes include the first electrode, the second electrode, and the third electrode.
A resonator drive method comprising:
- driving a third electrode that is higher than the first electrode and the second electrode based on an upper surface of the substrate, which are spaced apart from each other at a first interval on a substrate, to descend toward the substrate;
- and
- arranging the third electrode between the first electrode and the second electrode to be in contact with the upper surface of the substrate and arranging the first electrode, the second electrode, and the third electrode to be spaced apart from one another at a second interval,
- wherein the second interval is less than the first interval.
Dependencies are inferred from the claim text.