Semiconductor package and manufacturing method thereof
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsChun-Yen Lan, Chih-Chien Pan, Pu Wang, Li-Hui Cheng, Ying-Ching Shih, Yu-Wei Lin
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AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsChun-Yen Lan, Chih-Chien Pan, Pu Wang, Li-Hui Cheng, Ying-Ching Shih, Yu-Wei Lin
Estimating the term…
A package structure includes a circuit substrate, a package unit, a thermal interface material and a cover. The package unit is disposed on and electrically connected with the circuit substrate. The package unit includes a first surface facing the circuit substrate and a second surface opposite to the first surface. A underfill is disposed between the package unit and the circuit substrate, surrounding the package unit and partially covering sidewalls of the package unit. The cover is disposed over the package unit and over the circuit substrate. An adhesive is disposed on the circuit substrate and between the cover and the circuit substrate. The thermal interface material includes a metal-type thermal interface material and is disposed between the cover and the package unit. The thermal interface material physically contacts the second surface and the sidewalls of the package unit and physically contacts the underfill.
A package structure, comprising:
A package structure, comprising:
A manufacturing method of a semiconductor structure, comprising:
Dependencies are inferred from the claim text.