Pipeline temperature control equipment and pipeline temperature control method

A pipeline temperature control equipment, used in a semiconductor equipment, comprising a processing device and multiple heating assemblies, wherein the multiple heating assemblies are distributed along an extension direction of a temperature-controlled pipeline to correspondingly control temperatures of multiple heated parts of the temperature-controlled pipeline, and each of the multiple heating assemblies comprises a heating device, a first temperature measuring device, a second temperature measuring device, and a control device;

• both the first temperature measuring device and the second temperature measuring device in each heating assembly are used to measure a real-time temperature of a heated part of the multiple heated parts in the temperature-controlled pipeline corresponding to the heating device in the heating assembly;
• both the first temperature measuring device and the second temperature measuring device in each heating assembly are connected to the control device in the heating assembly;
• and multiple control devices are connected to the processing device;
• the processing device is configured to, according to respective target temperatures of each of the multiple heated parts in the temperature-controlled pipeline and respective measured values of first temperature measuring devices of the multiple heating assemblies, control operations of multiple heating devices through the multiple control devices respectively, until temperatures of the multiple heated parts meet the respective target temperatures;
• the processing device is further configured to, when a measured value of the first temperature measuring device is abnormal within a preset time period, according to a measured value of a corresponding second temperature measuring device and a target temperature of a corresponding heated part, control a corresponding heating device by a corresponding control device to heat the heated part;
• and
• the processing device is further configured to, when measured values of both the first temperature measuring device and the second temperature measuring device in any one of the multiple heating assemblies are abnormal within their respective preset time periods, control the corresponding heating device by the corresponding control device to follow a heating state of a heating device of an adjacent heated part to heat the heated part.