Method and Apparatus for Automatic Self Calibration of Mass Flow Controller
AssigneeMKS Instruments, Inc.
InventorJunhua Ding
Life of this patent
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Abstract
A mass flow controller and methods of providing for mass flow control are provided. A mass flow controller includes a control valve configured to control flow of a fluid in a flow path. A first flow sensor detects a first set of fluid flow parameters, and a second flow sensor detects a second set of fluid flow parameters. The first and second flow sensors are of distinct flow measurement types. The mass flow controller further includes a controller configured to determine a set of first mass flow rates based on the first set of fluid flow parameters detected by the first flow sensor and calibrate the second flow sensor based on the determined set of mass flow rates of the first mass flow sensor and the second set of fluid flow parameters.
Claims21
A mass flow controller comprising:
- a control valve configured to control flow of a fluid in a flow path;
- a first flow sensor that detects a first set of fluid flow parameters;
- a second flow sensor that detects a second set of fluid flow parameters, the first and second flow sensors being of distinct flow measurement types;
- and
- a controller configured to:
- determine a set of first mass flow rates based on the first set of fluid flow parameters detected by the first flow sensor;
- and
- calibrate the second flow sensor based on the determined set of mass flow rates of the first flow sensor and the second set of fluid flow parameters.
A method of providing for mass flow control comprising:
- determining a first set of mass flow rates based on a first set of fluid flow parameters detected by a first flow sensor of a fluid flowing in a flow path, the flow controlled by a control valve;
- and
- calibrating a second flow sensor based on the determined set of mass flow rates of the first mass flow sensor and a second set of fluid flow parameters detected by the second flow sensor, the first and second flow sensors being of distinct flow measurement types.
Dependencies are inferred from the claim text.