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US 2025/0053088 A1Published application
Composition for forming resist underlayer film having saccharin skeleton
AssigneeNissan Chemical Corporation
InventorsTomotada HIROHARA, Mamoru TAMURA
Life of this patent
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Abstract
A composition for forming a resist underlayer film, containing a solvent and a polymer including a structure represented by formula (A) below. In formula (A), * represents a bond.
Claims12
A composition for forming a resist underlayer film, comprising a solvent and a polymer including a structure represented by formula (A) below:
- in formula (A), * represents a bond.
A polymer having a unit structure represented by formula (1) below:
- in formula (1), Ar represents a benzene ring, a naphthalene ring, or an anthracene ring,
- R1 represents a hydroxy group, a mercapto group which may be protected by a methyl group, an amino group which may be protected by a methyl group, a halogen atom, or an alkyl group having 1 to 10 carbon atoms, which may be substituted or interrupted by a hetero atom or may be substituted by a hydroxy group,
- n1 represents an integer of 0 to 3,
- n2 represents 1 or 2,
- L1 represents a single bond or an alkylene group having 1 to 10 carbon atoms,
- Y represents a group represented by formula (A-2) below,
- T1 represents a single bond, an ether bond, an ester bond, or an amide bond (—NHCO—) when n2 is 1,
- T1 represents a nitrogen atom or an amide bond when n2 is 2,
- in formula (A-2), T2 represents a divalent organic group having 1 to 10 carbon atoms,
- X represents —CO— or —SO2—,
- Ra represents a halogen atom, an alkyl group having 1 to 8 carbon atoms, which may have a substituent, an alkoxy group having 1 to 8 carbon atoms, which may have a substituent, an alkylthio group having 1 to 5 carbon atoms, a nitro group, or a cyano group,
- n represents an integer of 0 to 4,
- when there are two or more Ra's, two or more Ra's may be identical or different, and
- * represents a bond.
11 more elements
Dependencies are inferred from the claim text.