Optical devices and methods of manufacture
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsSu-Chun Yang, Chen Chiang Yu, Jui Hsuan Tsai, Jih-Churng Twu, Chung-Shi Liu, Chen-Hua Yu
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Abstract
Optical devices and methods of manufacture are presented in which a non-linear material is deposited or otherwise placed. Once the non-linear material has been deposited, implantation regions are formed within the non-linear material using an implantation process. The implantation regions are removed using an etching process, and electrodes are formed to the remaining material.
Claims20
A method of manufacturing an optical device, the method comprising:
- depositing a non-linear material;
- forming an implantation region within the non-linear material;
- removing the implantation region over a first portion of the non-linear material;
- and
- forming an electrode to the first portion.
A method of manufacturing a semiconductor device, the method comprising:
- depositing a non-linear material onto a substrate;
- modifying an etching characteristics of a first region of the non-linear material;
- etching the first region and leaving a non-etched region;
- and
- forming an electrode to the non-etched region.
An optical device comprising:
- a non-linear material over a substrate;
- a first electrode adjacent to a first side of the non-linear material;
- and
- a second electrode adjacent to a second side of the non-linear material.
Dependencies are inferred from the claim text.