Integrated-Optics Waveguide Having High-Stress-Sensitivity Region
AssigneeLioniX International BV
InventorsRené Gerrit HEIDEMAN, Thi Lan Anh TRAN, Arnoud Sebastiaan EVERHARDT
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Abstract
Aspects of the present disclosure describe integrated-optics-based phase controllers comprising waveguides whose cores have one or more cavities, thereby enabling them to exhibit an enhanced photo-elastic effect and/or increased stress-induced deformation in at least one region. Waveguides in accordance with the present disclosure are particularly well suited for use in stress-optic phase controllers suitable for use in systems such as microwave photonics, LIDAR and the like.
Claims15
An apparatus comprising a phase controller that includes:
- a first waveguide portion for guiding a light signal characterized by a mode field having a mode-field diameter, wherein the first waveguide portion is disposed on a substrate and includes a first core that includes at least one cavity that is located within the mode-field diameter;
- and
- a first stress-optic phase-control (SOPC) element disposed on the first waveguide portion, wherein the first SOPC element is configured to induce a first stress in the first core, and wherein the first SOPE element includes:
- first and second electrodes;
- and
- a first piezoelectric layer that is electrically coupled with each of the first and second electrodes.
A method comprising forming a phase controller via operations including:
- forming a first waveguide for guiding a light signal characterized by a mode field having a mode-field diameter (MFD), wherein the first waveguide is formed on a substrate such that the first waveguide includes a first waveguide portion having a first core that comprises at least one cavity that is located within the mode-field diameter;
- and
- forming a first stress-optic phase-control element on the first waveguide portion, wherein the first stress-optic phase-control element is configured to induce a first stress in the first core, and wherein the first stress-optic phase-control element is formed such that it includes:
- first and second electrodes;
- and
- a piezoelectric layer disposed between the first and second electrodes.
Dependencies are inferred from the claim text.