Functional imprinted optical structures for optical devices
AssigneeApplied Materials, Inc.
InventorsYingnan LIU, Samarth BHARGAVA, Kevin MESSER, Evan WANG, David Alexander SELL, Simon LORENZO
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AssigneeApplied Materials, Inc.
InventorsYingnan LIU, Samarth BHARGAVA, Kevin MESSER, Evan WANG, David Alexander SELL, Simon LORENZO
Estimating the term…
Embodiments of the present disclosure include apparatus and methods for optical devices. In one embodiment, a method for forming an optical device generally includes disposing a first material device layer on a substrate, patterning a portion of the first material device layer to form a first plurality of device structures in the first material device layer, disposing a second material device layer on an un-patterned portion of the first device material layer, and patterning the second material device layer to form a second plurality of device structures disposed on the first material device layer.
A method for forming an optical device, comprising:
An optical device, comprising:
Dependencies are inferred from the claim text.