Physical Quantity Sensor, Inertial Measurement Unit, And Method For Manufacturing Physical Quantity Sensor

An angular velocity sensor comprising:

• a movable body;
• a base;
• and
• a lid, the lid being formed of a first material and having an upper major surface, an opposite lower major surface that faces the base, and a plurality of side surfaces that connect the upper major surface to the opposite lower major surface, wherein
• the movable body is housed in a space between the base and the lid,
• the space is sealed by sealing a through hole provided in the lid with a melt portion, the melt portion being formed of the first material,
• the melt portion is substantially circular in a plan view, and includes an annular surface that convexly extends outward from the upper major surface,
• a first surface of the lid faces the base,
• a second surface of the lid is opposite to the first surface, and
• 0.50≤D/L≤3.00,
• wherein D is a length from the second surface to an end of the melt portion nearest the first surface, and L is a diameter of the melt portion nearest the second surface in the plan view, and
• an air pressure of the space is 0.1 Pa to 10 Pa.