Sensor assembly and method of manufacture
AssigneesAnalog Devices International Unlimited Company, Arma Biosciences
InventorsDavid BOLOGNIA, Joyce WU, Helen BERNEY, Surath GOMIS, Shana KELLEY
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Abstract
The present disclosure provides a sensor assembly for measuring a property of a sample. The sensing assembly comprises first and second dielectric layers. The first dielectric layer provides a well or aperture which is associated with an electrode. The second dielectric layer is provided on the first dielectric layer and provides an aperture fluidly connected to the well or aperture in the first dielectric layer.
Claims20
A sensor assembly for measuring a property of a sample, comprising:
- a substrate;
- at least one electrode provided on the substrate;
- a first dielectric layer provided on the substrate, the first dielectric layer comprising a well or aperture associated with the electrode such that the electrode is responsive to the presence of a sample received within the well or aperture;
- and
- a second dielectric layer provided on the first dielectric layer comprising an aperture extending through the second dielectric layer fluidly connected to the well or aperture in the first dielectric layer.
A method of forming a sensor assembly, the method comprising:
- providing a substrate;
- forming at least one electrode on the substrate;
- providing a first dielectric layer on the substrate;
- and
- providing a second dielectric layer on the first dielectric layer,
- wherein the first dielectric layer comprises a well or aperture associated with the electrode such that the electrode is responsive to the presence of a sample received within the well or aperture;
- and
- wherein the second dielectric layer comprises an aperture extending through the second dielectric layer and is fluidly connected to the well or aperture in the first dielectric layer.
Dependencies are inferred from the claim text.