Sensor

Abstract

According to one embodiment, a sensor includes a base, a fixed electrode, a first fixed portion, a first support portion, and a movable portion supported by the first support portion. The base includes first and second regions. The fixed electrode and the first fixed portion are fixed to the first region and the second region, respectively. The first support portion is connected to the first fixed portion, and includes a first support layer, a first layer, and a second layer. The first layer is provided between the first support layer and at least a part of the second layer in a first direction from the first support layer to the second layer. The first layer includes oxygen and a first element including at least one selected from the group consisting of Pt, Pd and Ti. The second layer includes oxygen and a second element different from the first element.

Dependencies are inferred from the claim text.