Dual frequency comb imaging spectroscopic ellipsometer

A measurement system comprising:

• a controller including one or more processors configured to execute program instructions causing the one or more processors to:
• generate a transfer matrix dataset including measurements of one or more transfer matrix elements associated with a sample based on at least one of spatial, spectral or temporal analysis of a sequence of images, wherein the transfer matrix dataset is at least one of spatially resolved or spectrally resolved, wherein the sequence of images is generated by a measurement sub-system comprising:
• a first frequency comb source configured to generate a first frequency comb;
• a second frequency comb source configured to generate a second frequency comb with a different repetition rate than the first frequency comb, wherein the second frequency comb source is at least one of frequency or phase-locked to the first frequency comb source;
• an illumination sub-system including one or more illumination lenses to direct an illumination beam including at least one of the first frequency comb or the second frequency comb to the sample;
• an imaging sub-system including one or more imaging lenses and a detector configured to generate the sequence of images of the sample based on the first frequency comb and the second frequency comb;
• and
• one or more coding optical elements including one or more optical retarders, wherein the one or more coding optical elements encode data associated with the one or more transfer matrix elements into the sequence of images of the sample, wherein the data associated with the one or more transfer matrix elements is encoded into at least one of a spatial domain, a spectral domain, or a time domain of the sequence of images;
• and
• generate one or more measurements of the sample based on the transfer matrix dataset.

A measurement method comprising:

• generating a transfer matrix dataset including measurements of one or more transfer matrix elements associated with a sample based on at least one of spatial, spectral, or temporal analysis of a sequence of images of the sample, wherein the transfer matrix dataset is at least one of spatially, spectrally, or temporally resolved, wherein the sequence of images is generated by a measurement sub-system comprising:
• a first frequency comb source configured to generate a first frequency comb;
• a second frequency comb source configured to generate a second frequency comb with a different repetition rate than the first frequency comb, wherein the second frequency comb source is at least one of frequency or phase-locked to the first frequency comb source;
• an illumination sub-system including one or more illumination lenses to direct an illumination beam including at least one of the first frequency comb or the second frequency comb to the sample;
• an imaging sub-system including one or more imaging lenses and a detector configured to generate the sequence of images of the sample based on the first frequency comb and the second frequency comb;
• and
• one or more coding optical elements including one or more optical retarders, wherein the one or more coding optical elements encode data associated with the one or more transfer matrix elements into the sequence of images of the sample, wherein the data associated with the one or more transfer matrix elements is encoded into at least one of a spatial domain, a spectral domain, or a time domain of the sequence of images;
• and
• generating one or more measurements of the sample based on the transfer matrix dataset.