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US 2025/0052662 A1Published application
Quartz crystal microbalance impactor
AssigneeWashington University
InventorsElijah Thimsen, Eric Husmann
Life of this patent
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Abstract
The present disclosure is directed to a quartz crystal microbalance (QCM) impactor and method of using same. The QCM impactor is particularly useful for detecting particles at low mass concentrations, such as for semiconductor process monitoring applications.
Claims20
A quartz crystal microbalance (QCM) impactor, comprising:
- an orifice tube comprising an orifice nozzle;
- a QCM sensor;
- and
- optionally a shutter;
- wherein the QCM impactor is configured to deliver particles towards a detection position of the QCM sensor.
2 more elements
A method of using a quartz crystal microbalance (QCM) impactor, comprising:
- an orifice tube comprising an orifice nozzle;
- a QCM sensor;
- and
- optionally a shutter;
- wherein the QCM impactor is configured to deliver particles towards a detection position of the QCM sensor,
- the method comprising:
- flowing a process gas comprising particles through the orifice tube and the orifice nozzle;
- delivering the process gas comprising particles from the orifice nozzle to the QCM sensor;
- and
- quantifying a mass of the particles in the process gas.
7 more elements
Dependencies are inferred from the claim text.